CVD Diamond
 

 

Principle of CVD Diamond coating process

 

6'' Diamond coated wafers

    

 

Technology

Our expertise covers all areas of carbon based deposition technologies including diamond coatings and systems.

CVD Coating Process is a microwave excited chemical vapor deposition process. The microwave energy is fed via wave guides into the cavity. At a properly adjusted cavity geometry an electromagnetic field density pattern is formed to cause a plasma discharge in a hydro-carbon gas atmosphere.

Adjusting process parameters such as substrate temperature, gas flow mixtures, and process allows the formation of diamond films on the substrate.

 

Properties and Applications

Diamond...

  • is the hardest substance known to man so a natural choice for cutting and abrasive applications
  • has the highest thermal conductivity at room temperature and is therefore superb in heating and cooling applications
  • has a very low co-efficient of friction and is subsequently exceptional when used for wear resistant applications
  • is optically excellent so makes superb lens material e.g. for high power lasers

We offer diamond generation as thin film as well as freestanding material, diamond characterization and consulting services to support customers using diamond applications.


    Diamond Fabrication - Freestanding Diamond
    Diamond Electrochemical Electrodes

 

Equipment

We have five 2.45 GHz reactors as well as 915MHz reactor for larger area deposition.


    Large Area Microwave Diamond Deposition System

 

Contact

Thomas Schuelke
Phone: 1-517- 432-8173

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© 2009 Fraunhofer Center for Coatings and Laser Applications
cclinfo@fraunhofer.org, Phone: 1-517-432-8711

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